Title：Observation of Surface Potential of Micropatterned Self-assembled Electrets for MEMS Vibrational Energy Harvesters
Journal：Sensors and Materials, vol. ●●, no.●(●), pp. ●●-●● (accepted May 11, 2023).
Authors：Daisuke Yamane, Kosuke Kawashima, Reiki Sugimoto, Ruichen Li, Hideyuki Kayaguchi, Keisuke Kurihara, Hisao Ishii, and Yuya Tanaka
We have successfully measured and evaluated the surface potential and shape of micropatterned self-assembled electrets.
Potential applications include MEMS energy harvesters (ultra-compact power generation devices).
This is the result of joint research with Ritsumeikan University, Gunma University, and Chiba University.