MEMS × Functional Materials × LSI × AI
We develop smart micro-mechatronic systems by integrating MEMS/NEMS, functional materials, semiconductor technologies, and intelligent information processing.
Our research spans materials, devices, circuits, modeling, and system integration, with applications in sensing, energy harvesting, resonators, and emerging intelligent microsystems.
Four Core Technologies
MEMS / NEMS
Micro- and nanoscale structures for sensing, actuation, energy harvesting, and resonant functions.
Functional Materials / SAE
Functional materials, including self-assembled electrets, that provide built-in electrical functions without conventional charging processes.
CMOS / LSI Integration
Integration of MEMS with semiconductor circuits for compact, low-power, and intelligent microsystems.
Modeling / Edge Intelligence
Physics-based modeling and edge intelligence for device design, prediction, and information processing.
Current Research Topics
Our current research is organized around the following five themes.
SAE-MEMS / Energy Harvesting
Self-assembled electrets (SAEs) spontaneously form orientation polarization during vacuum deposition and can provide electrostatic bias without a separate charging process. We study their integration with MEMS for self-biased sensors and vibration energy harvesters.
Our research includes back-end integration after MEMS fabrication, patterned SAEs, optical trimming, microcavity structures, and electromechanical modeling.
CMOS-MEMS Integration
We integrate MEMS structures with CMOS/LSIs to reduce parasitic capacitance, enable on-chip signal processing, and realize compact, low-power sensor systems.
By combining CMOS-MEMS with electrets, we aim to develop highly integrated microsystems that operate with minimal power.
MEMS Sensors / Harvesters / Resonators
We develop electrostatic MEMS devices for inertial sensing, acoustic sensing, pressure sensing, vibration energy harvesting, and resonant applications.
Our research covers device design, microfabrication, experimental characterization, equivalent-circuit modeling, and nonlinear dynamics.
Optical Fiber × MEMS
We explore the integration of optical fibers with MEMS and functional materials to create compact optomechanical sensing and functional-device platforms.
Our research combines optical, mechanical, and microfabrication technologies to develop new hybrid microsystems.
Edge Intelligence / MEMS-NEMS Reservoir
We investigate physical reservoir computing and edge intelligence using MEMS/NEMS resonators and nonlinear microdevices.
Our goal is to perform part of sensing and information processing directly within physical devices, reducing data transfer and computational load.
Related and Emerging Topics
Organic thermoelectric devices ｜ Novel functional materials ｜ Emerging MEMS fabrication and sensing concepts
Research Approach
Our research combines fabrication, characterization, modeling, and system integration.
Fabrication
MEMS/NEMS microfabrication, CMOS-MEMS, and functional-material integration
Characterization
Electrical, mechanical, optical, and surface-potential measurements
Modeling
FEM, equivalent circuits, nonlinear dynamics, and data analysis
Integration
Sensors, energy harvesters, edge intelligence, and autonomous microsystems
We iteratively connect fabrication, measurement, modeling, and system integration.
This approach allows us to link materials, structures, circuits, and information processing within a unified design framework.