査読付学術論文|Journal Papers

  1. Daisuke Yamane, Kentaro Tamura, Keigo Nota, Ryuta Iwakawa, Cheng-Yao Lo, Kazumoto Miwa, and Shimpei Ono,
    “Contactless Electrostatic Vibration Energy Harvesting using Electric Double Layer Electrets,”
    Sensors and Materials, vol. 34, no.5(3), pp. 1869-1877, May 24, 2022.
    DOI: https://doi.org/10.18494/SAM3945
  2. Yukiya Tohyama, Hiroaki Honma, Hiroshi Toshiyoshi, and Daisuke Yamane,
    “Bandwidth Broadening of MEMS Vibration Energy Harvesters by Voltage-Boost Rectifier Circuit,”
    Sensors and Materials, vol. 34, no.5(3), pp. 1889-1897, May 24, 2022.
    DOI: https://doi.org/10.18494/SAM.2022.3502
  3. Taro Omura, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression,”
    Surface and Coating Technology, vol. 436, 128315, April 25, 2022.
    DOI: https://doi.org/10.1016/j.surfcoat.2022.128315
  4. Yiming Jiang, Chun-Yi Chen, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang,
    “Electrodeposition and Micro-Mechanical Property Characterization of Nickel–Cobalt Alloys toward Design of MEMS Components,”
    Electrochem, vol. 3, 198-210, April 13, 2022.
    DOI:  https://doi.org/10.3390/electrochem3020012
  5. Daisuke Yamane, Hideyuki Kayaguchi, Kosuke Kawashima, Hisao Ishii, and Yuya Tanaka,
    “MEMS post-processed self-assembled electret for vibratory energy harvesters,”
    Applied Physics Letters, Vol. 119, 254102, Dec. 20, 2021.
    DOI: https://doi.org/10.1063/5.0072596
  6. 遠山 幸也, 本間 浩章, 関屋 英彦, 年吉 洋, 山根 大輔
    「低閾値整流昇圧回路を用いた非定常振動下における振動発電」
    電気学会論文誌E(センサ・マイクロマシン部門誌), vol.141, no.7, pp.228-232, July 2021.
    DOI: https://doi.org/10.1541/ieejsmas.141.228
  7. Hitomi Watanabe, Tso-Fu Mark Chang, Michael Schneider, Ulrich Schmid, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    “Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency,”
    Electrochem, vol. 2, issue 2, pp. 216-223, April 8, 2021.
    DOI: https://doi.org/10.3390/electrochem2020015
  8. Yu-Hao Jen, Chia-Tso Mo, Yu-Wen Chen, Emile Martincic, Daisuke Yamane, Tso-Fu Chang, Masato Sone and Cheng-Yao Lo,
    “Development and Characterization of Vertically Stacked Tactile Sensor with Hollow Structure,”
    IEEE Sensors Journal, Vol. 21, No. 5, pp. 5809 – 5818, March 1, 2021.
    DOI: https://doi.org/10.1109/JSEN.2020.3037261
  9. Yiming Jiang, Chun-Yi Chen, Tso-Fu Mark Chang, Xun Luo, Daisuke Yamane, Masato Sone,
    “Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test,”
    Electrochem, vol. 2, issue 1, pp. 1-9, Dec. 2020.
    DOI: https://doi.org/10.3390/electrochem2010001 
  10. Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties,”
    Electrochem, vol. 1, issue 4, pp. 388-393, Nov. 2020.
    DOI: https://doi.org/10.3390/electrochem1040025
  11. Kosuke Suzuki, Tso-Fu Mark Chang, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Sample Geometry Effect on Mechanical Property of Gold Micro-Cantilevers by Micro-Bending Test,”
    MRS Communications, vol. 10, Issue 3, pp. 434-438, Sept. 2020.
    DOI:  https://doi.org/10.1557/mrc.2020.38
  12. Kazuya Masu, Katsuyuki Machida, Daisuke Yamane, Hiroyuki Ito, Noboru Ishihara, Tso-Fu Mark Chang, Masato Sone, Ryo Shigeyama, Taiki Ogata and Yoshihiro Miyake,
    CMOS-MEMS Based Microgravity Sensor and Its Application,”
    ECS Transactions, vol. 97, no. 5, pp. 91-108, April 2020.
    DOI: https://doi.org/10.1149/09705.0091ecst
  13. Kyotaro Nitta, Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu and Masato Sone,
    Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers,”
    Journal of The Electrochemical Society, vol. 167, no. 8, pp.082503, April 2020.
    DOI: https://doi.org/10.1149/1945-7111/ab8805
  14. Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hidehiko Sekiya, Hiroshi Toshiyoshi and Daisuke Yamane,
    “A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations,”
    Journal of Physics: Conference Series, vol. 1407, pp. 012101 1-4, Nov. 2019.
    DOI: https://doi.org/10.1088/1742-6596/1407/1/012101
  15. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu,
    A MEMS Accelerometer for Sub-mG Sensing,”
    Sensors and Materials, vol. 31, no.9, pp.2883-2894,2019.
    DOI: https://doi.org/10.18494/SAM.2019.2122
    Sensors and Materials Young Researcher Paper Award 2019 (2020.4.10)
  16. Haochun Tang, Tso-Fu Mark Chang, Yaw-Wang Chai, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect,”
    Metals, vol. 9, no.9, pp.987-1 – 987-9, Sept. 2019.
    DOI: https://doi.org/10.3390/met9090987
  17. Keisuke Asano, Tso-Fu Mark Chang, Haochun Tang, Takashi Nagoshi, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components,”
    ECS Journal of Solid State Science and Technology, vol. 8, no. 8, pp.412-415, July 2019.
    DOI: https://doi.org/10.1149/2.0151908jss
  18. Kyotaro Nitta, Tso-Fu Mark Chang, Koichiro Tachibana, Hao-chun Tang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test,”
    Microelectronic Engineering, vol. 215, pp.111001-1 – 111001-4, July 2019.
    DOI: https://doi.org/10.1016/j.mee.2019.111001
  19. Yu-Hong Gao, Yu-Hao Jen, Rongshun Chen, Daisuke Yamane, and Cheng-Yao Lo,
    Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity,”
    Sensors & Actuators: A. Physical, vol.293, 1 July 2019, pp.167-177.
    DOI: https://doi.org/10.1016/j.sna.2019.04.043
  20. Ken Hashigata, Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    Strengthening of micro-cantilever by Au/Ti bi-layered structure evaluated by micro-bending test toward MEMS devices,”
    Microelectronic Engineering, vol.213, 15 May 2019, pp.13-17.
    DOI: https://doi.org/10.1016/j.mee.2019.04.008
  21. KoichiroTachibana, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    Long-term structure stability of Ti/Au layered micro-cantilever evaluated by vibration test,”
    Microelectronic Engineering, vol.207, 15 Feb. 2019, pp.33-36.
    DOI: https://doi.org/10.1016/j.mee.2019.01.002
  22. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nasgoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications,”
    Microelectronic Engineering, vol. 195, 2018, pp. 20-24. (Available online 30 April 2018)
    DOI: https://doi.org/10.1016/j.mee.2018.04.021
  23. Hao-Chun Tang, Ken Hashigata, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Toshifumi Konishi, Daisuke Yamane,Katsuyuki Machida, Kazuya Masu, Masato Sone
    Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide,”
    Elsevier Surface and Coatings Technology, vol. 350, 2018, pp. 1065-1070. (Available online 12 February 2018)
    DOI: https://doi.org/10.1016/j.surfcoat.2018.02.041
  24. Motohiro Takayasu, Ippei Tsuji, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
    Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer,”
    Sensors and Materials, vol. 30, no. 12, 2018, pp.2919-2926.
    DOI: https://doi.org/10.18494/SAM.2018.1840
  25. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
    Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices,”
    Journal of The Electrochemical Society, vol. 165, 2018, pp.D58-D63.
    DOI: https://doi.org/10.1149/2.0441802jes
  26. Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, and Kazuya Masu
    A 0.18-μm CMOS Time-Domain Capacitive-Sensor Interface for Sub-1mG MEMS Accelerometers,”
    IEICE Electronics Express (ELEX), vol. 15, no. 2, 2018, pp.20171227.
    DOI: https://doi.org/10.1587/elex.15.20171227
  27. Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone
    Enhancement in Structure Stability of Gold Micro-Cantilever by Constraints at the Fixed-End for Applications as Movable Structures of MEMS,”
    Microelectronics Engineering, vol. 187-188, 2018, pp.105-109.
    DOI: https://doi.org/10.1016/j.mee.2017.11.015
  28. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    Deformation behavior of electroplated gold composed of nano-columnar grains embedded in micro-columnar textures,”
    Materials Letters, Vol. 202, Sep. 2017, pp. 82-85.
    DOI: https://doi.org/10.1016/j.matlet.2017.05.066
  29. Keisuke Asano, Hao-Chun Tang, Takashi Nasgoshi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices,”
    Microelectronics Engineering, vol. 180, Aug. 2017, pp.15-19.
    DOI: https://doi.org/10.1016/j.mee.2017.05.044
  30. Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    Tensile Tests of Micro-Specimens Made of Electroplated Gold,”
    Microelectronics Engineering, vol. 174, April 2017, pp. 6-10.
    DOI: https://doi.org/10.1016/j.mee.2016.12.004
  31. Hao-Chun Tang, Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices,”
    Journal of The Electrochemical Society, vol. 164, issue 4, Feb. 2017, pp. D244-D247.
    DOI: https://doi.org/10.1149/2.141704jes
  32. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu and Katsuyuki Machida,
    Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer,”
    Microelectronics Reliability, vol. 66, November 2016, pp. 78-84.
    DOI: https://doi.org/10.1016/j.microrel.2016.09.018
  33. Hao-chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide,”
    Electrochemistry Communications, vol. 72, November 2016, pp. 126-130.
    DOI: http://dx.doi.org/10.1016/j.elecom.2016.09.019
  34. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression,”
    Materials Transactions, Vol. 57, No. 8, 2016, pp. 1257-1260.
    DOI: http://doi.org/10.2320/matertrans.MG201612
  35. Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength,”
    Electrochemistry Communications, Vol.67, 2016, pp. 51-54.
    DOI: http://dx.doi.org/10.1016/j.elecom.2016.03.017
  36. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    A 1-mG MEMS Sensor,”
    ECS Transactions, vol. 72, issue 3, 2016, pp. 7-14.
    DOI: https://doi.org/10.1149/07203.0007ecst
  37. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone
    Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers,”
    Microelectronics Engineering, vol. 159, 2016, pp.90-93.
    DOI: http://dx.doi.org/10.1016/j.mee.2016.02.054
  38. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    A 0.1G-to-20G Integrated MEMS Inertial Sensor,”
    Japanese Journal of Applied Physics, vol. 54, no. 8, 2015, pp. 087202.1-087202.4.
    DOI: https://doi.org/10.7567/JJAP.54.087202
  39. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass,”
    Microsystem Technologies, vol. 22, 2016, pp. 459-464.
    (online version: published on April 26, 2015)
    DOI: https://doi.org/10.1007/s00542-015-2539-y
  40. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    A Sub-1G MEMS Sensor,”
    ECS Transactions, vol. 66, issue 5, 2015, pp.131-138.
    DOI: https://doi.org/10.1149/06605.0131ecst
  41. 山根 大輔, 小西 敏文, 松島 隆明, 亀井 将太, 益 一哉, 町田 克之
    高感度静電容量型センサにおけるBrownian Noise評価手法
    電気学会論文誌E(センサ・マイクロマシン部門誌), vol.135, no.4, pp.142-143, April 2015.
    DOI: http://dx.doi.org/10.1541/ieejsmas.135.142
  42. Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu,
    Integrated CMOS-MEMS Technology and Its Applications,”
    ECS Transactions, vol. 61, issue 6, 2014, pp.21-39.
    DOI: https://doi.org/10.1149/06106.0021ecst
  43. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, and Hiroshi Toshiyoshi,
    A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology,”
    Japanese Journal of Applied Physics, vol. 53, 2014, pp. 04EE15.1-7.
    (Special issue on SSDM 2013)
    DOI: https://doi.org/10.7567/JJAP.53.04EE15
  44. Motohiro Takayasu, Atsushi Shirane, Sangyeop Lee, Daisuke Yamane, Hiroyuki Ito, Xiaoyu Mi, Hiroaki Inoue, Fumihiko Nakazawa, Satoshi Ueda, Noboru Ishihara, and Kazuya Masu,
    An 8 channel, 20 V output CMOS switching driver with 3.3 V power supply using triple-well biasing techniques for integrated MEMS device control,”
    Japanese Journal of Applied Physics, vol. 53, 2014, pp. 04EE13.1-8.
    (Special issue on SSDM 2013)
    DOI: https://doi.org/10.7567/JJAP.53.04EE13
  45. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi and Kazuya Masu,
    “Design of sub-1g microelectromechanical systems accelerometers,”
    Applied Physics Letters, Vol. 104, Issue 7, 074102, Feb. 2014.
    DOI: https://doi.org/10.1063/1.4865377
  46. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, and Hiroshi Toshiyoshi,
    An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology,”
    Japanese Journal of Applied Physics, Vol. 53, 027202, pp. 027202-1 – 027202-9, 2014.
    DOI: https://doi.org/10.7567/JJAP.53.027202
  47. 山根 大輔, サン ウィンストン, 川崎 繁男, 藤田 博之, 年吉 洋
    水平駆動型MEMS導波路の静電駆動時における高周波特性の評価手法
    電子情報通信学会論文誌C(エレクトロニクスソサエティ), Vol. J97-C, No. 1, pp.37-45, Jan. 2014.
  48. Daisuke Yamane, Yi-Chien Wu, Ting-Hsiang Wu, Hiroshi Toshiyoshi, Michael Teitell, and Pei-Yu Chiou,
    Electrical impedance monitoring of photothermal porated mammalian cells,”
    Journal of Laboratory Automation, vol. 19, no. 1, pp.50-59, Feb. 2014.
    (online version: published on June 24, 2013)
    DOI: https://doi.org/10.1177/2211068213494390
  49. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    Novel Sensor Structure and its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer,”
    Japanese Journal of Applied Physics, Vol. 52, No. 6, pp. 06GL04, June 2013.
    (Special issue on MNC 2012)
    DOI: https://doi.org/10.7567/JJAP.52.06GL04
  50. 山根 大輔, サン ウィンストン, 川崎 繁男, 藤田 博之, 年吉 洋
    エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用
    電子情報通信学会論文誌C(エレクトロニクスソサエティ), Vol. J95-C, No. 10, pp. 219-227, Oct. 2012.
  51. Daisuke Yamane, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining,”
    IEEE Journal of Microelectromechanical Systems, vol.20, no.5, pp.1211-1221, Oct. 2011.
    DOI: https://doi.org/10.1109/JMEMS.2011.2162490
  52. 山根 大輔, 李 宥憲, 藤田 博之, 年吉 洋
    メッキ金の厚膜マスクによるRF-MEMSコプレーナ導波路の製作
    電気学会論文誌E(センサ・マイクロマシン部門誌), vol.131, no.3, pp.130-131, March 2011.
    DOI: https://doi.org/10.1541/ieejsmas.131.130
  53. Daisuke Yamane, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design,”
    IEICE Electronics Express, vol.7, no.24, pp.1785-1789, Dec. 2010.
    DOI: https://doi.org/10.1587/elex.7.1785
  54. Daisuke Yamane, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism,”
    IEICE Electronics Express, vol.7, no.2, pp.80-85, Jan. 2010.
    DOI: https://doi.org/10.1587/elex.7.80