国際会議発表 | International Conferences

  1. 【Invited】
    Daisuke Yamane,
    “MEMS-Electret Integration Technology for Smart Sensors,”
    in Proc. International Conference on Smart Sensors (ICSS2024), Hsinchu, Taiwan, July 1-2, 2024. (Oral)
  2. 【Invited】
    Daisuke Yamane,
    “Integrating MEMS and Self-Assembled Electrets,”
    in Proc. 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Singapore, June 23-26, 2024. (Oral)
  3. Ruichen Li, Satoru Hosoi, Kyoichi Kakuno Yuichiro Sunagawa, Ayato Jingu, Ryo Koike, Reiki Sugimoto, Yuya Tanaka and Daisuke Yamane,
    “INVESTIGATION OF THE RELATIONSHIP BETWEEN SURFACE POTENTIAL AND FILM THICKNESS OF MICRO-PATTERNED SELF-ASSEMBLED ELECTRETS,”
    in Proc. The 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2023), December 11-14, 2023, Abu Dhabi, UAE, pp. 45-47. (Oral)
  4. Kyosuke Tokuno, Shohei Kinoshita, Fumihisa Sugitani, Toshiki Sono, Yuya Tanaka and Daisuke Yamane,
    “AN EQUIVALENT CIRCUIT MODEL OF SELF-ASSEMBLED ELECTRET MEMS VIBRATION ENERGY HARVESTERS BASED ON AN ENERGY DIAGRAM IN HARDWARE DESCRIPTION LANGUAGE,”
    in Proc. The 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2023), December 11-14, 2023, Abu Dhabi, UAE, pp. 274-276. (Poster)
  5. Kyosuke Tokuno, Shohei Kinoshita, Fumihisa Sugitani, Toshiki Sono, Yuya Tanaka and Daisuke Yamane,
    “A Simulation Platform for SAE-MEMS Vibration Energy Harvesters using Hardware Description Language on a Circuit Simulator,”
    in Proc. 36th International Microprocesses and Nanotechnology Conference (MNC2023), November 14-17, 2023, Keio Plaza Hotel Sapporo, Hokkaido, Japan, 17D-2-3. (Oral)
  6. Takuto Nakanishi, Ryo Nakashima, Cheng-Yao Lo, Heeyoung Lee, Yosuke Mizuno and Daisuke Yamane,
    “Enhanced Sensitivity of Modal Interference-Based Strain Sensing Using Micro Dry-Etched Perfluorinated Polymer Optical Fibers,”
    in Proc. 36th International Microprocesses and Nanotechnology Conference (MNC2023), November 14-17, 2023, Keio Plaza Hotel Sapporo, Hokkaido, Japan, 17D-2-3. (LateNews, Poster)
  7. 【Invited】
    Daisuke Yamane and Yuya Tanaka,
    “SAE-MEMS Technology for Electrostatic Vibrational Energy Harvesters,”
    in Proc. 244th ECS Meeting, Gothenburg, Sweden, October 8-12, 2023. (Oral)
  8. Reiki Sugimoto, Ruichen Li, Yuya Tanaka, and Daisuke Yamane,
    “Evaluation of Micropatterned Self-Assembled Electrets for MEMS Devices,”
    in Proc. The IEEE 19th International Symposium on Electrets (ISE19), September 18-22, 2023, Linz, Austria, p. 40. (Oral)
  9. Kyosuke Tokuno, Shohei Kinoshita, Hideyuki Kayaguchi, Keisuke Kurihara, Hisao Ishii, Yuya Tanaka, and Daisuke Yamane,
    “CIRCUIT SIMULATOR IMPLEMENTATION OF AN EQUIVALENT CIRCUIT MODEL OF SELF-ASSEMBLED ELECTRET VIBRATIONAL ENERGY HARVESTERS BASED ON AN ENERGY DIAGRAM,”
    in Proc. The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2023), June 25-29, 2023, Kyoto, Japan, pp. 1224-1227. (Poster)
  10. Tzu-Yi Hsu, Padmanabh P Pancham, Daisuke Yamane, and Cheng-Yao Lo,
    “UNIVERSAL OPTIMIZATION SOLUTION FOR DIELECTRIC GEOMETRY ONSENSITIVITY MAXIMIZATION IN FLEXIBLE CAPACITIVE TACTILE SENSORS,”
    in Proc. The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2023), June 25-29, 2023, Kyoto, Japan, pp. 1620-1623. (Poster)
  11. Kosuke Kawashima, Reiki Sugimoto, Ruichen Li, Hideyuki Kayaguchi, Keisuke Kurihara, Hisao Ishii, Yuya Tanaka, and Daisuke Yamane,
    “Direct Measurement of the Surface Potential of Micro-Patterned Self-Assembled Electrets for MEMS Vibrational Energy Harvesters,”
    in Proc. The 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), December 12- 15, 2022, Salt Lake City, UTAH, USA, pp. 307-308. (LateNews, short presentation & poster)
  12. Kyosuke Tokuno, Takahiro Naganawa, Shohei Kinoshita, Yuya Tanaka and Daisuke Yamane
    “A Simulation Environment for SAE-MEMS Vibration Energy Harvesters using Electric Circuit Simulator,”
    in Proc. 35th International Microprocesses and Nanotechnology Conference (MNC2022), November 8-11, 2022, JR Hotel Clement Tokushima, Tokushima, Japan, 10C-3-2. (Oral)
  13. Yiming Jiang, Chun-Yi Chen, Tomoyuki Kurioka, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, and Tso-Fu Mark Chang, 
    “Ultra-High Mechanical Strength and Thermal Stability of Electrodeposited Ni-B Alloys toward MEMS Micro-Components,” in Proc. 48th international conference on Micro and Nano Engineering – Eurosensors (MNE-ES), Sept. 19-23, 2022, Leuven, Belgium. (Poster)
  14. Keigo Nota, Kentaro Tamura, Kazumoto Miwa, Shimpei Ono, and Daisuke Yamane,
    “A Non-Contact Out-of-Plane Vibratory Energy Harvester with an Electric-Double-Layer Electret,”
    in Proc. The 10th Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 (APCOT 2022), May 29- June 1, 2022, Shanghai, China, online and on-site. (Oral)
  15. 【Invited】
    Daisuke Yamane,
    “Smart mechatronics for electrostatic MEMS vibration energy harvesters,”
    in Proc. The 17th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2022), Virtual Conference, April 14-17, 2022.
  16. Kentaro Tamura, Keigo Nota, Kazumoto Miwa, Shimpei Ono, and Daisuke Yamane,
    “Demonstration of Non-Contact Type Vibrational Energy Harvester with Electric Double Layer Electrets,”
    in Proc. The 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2021), Dec. 6-8, 2021, Virtual Conference. (Oral)
  17. Yiming Jiang, Chun-Yi Chen, Tso-Fu Mark Chang, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, and Masato Sone, “Micro-Mechanical Characterization of Electrodeposited Ni-Co Alloys toward Design of MEMS Components,”
    in Proc. Micro and Nano Engineering Conference 2021 (MNE2021), Sept. 20-23, 2021, Turin, Italy (Held both presence and on-line). (Poster)
  18. Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone, “Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components,”
    in Proc. Micro and Nano Engineering Conference 2021 (MNE2021), Sept. 20-23, 2021, Turin, Italy (Held both presence and on-line). (Poster)
  19. Taro Omura, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone, “Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test,”
    in Proc. Micro and Nano Engineering Conference 2021 (MNE2021), Sept. 20-23, 2021, Turin, Italy (Held both presence and on-line). (Poster)
  20. Kazuya Fujita, Kosuke Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone, “Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect,”
    in Proc. Micro and Nano Engineering Conference 2021 (MNE2021), Sept. 20-23, 2021, Turin, Italy  (Held both presence and on-line).(Poster)
  21. Kosuke Suzuki, Yu-An Chien, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone
    “Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test,”
    in Proc. PRiME 2020 (ECS, ECSJ, & KECS Joint Meeting), Oct. 4-9, 2020, Online. (Oral)
  22. Takashi Ichikawa, Ken Atsumi, Tatsuya Koga, Daisuke Yamane, Shin-ichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
    “A 100-nG/√Hz-Level Single Au Proof-Mass 3-axis MEMS Accelerometer with Pillar-Shaped Electrodes,”
    in Proc. Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2020), 15-26 June 2020, Virtual Event. (Oral)
  23. Tso-Fu Mark Chang, Hao-Chun Tang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Electrodeposition of Au-Cu Alloys and the Micro-Mechanical Properties,”
    in Proc. 237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020), May 10-14, 2020, Montreal, Canada. (Oral)
  24. Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu,
    “A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing,”
    in Proc. The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020), March 23-26, 2020, Hiroshima, Japan. (LateNews, Poster)
  25. Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hidehiko Sekiya, Hiroshi Toshiyoshi, and Daisuke Yamane,
    “Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit,”
    in Proc. The 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2019), December 2-6, 2019, Krakow, Poland. (LateNews, Poster)
  26. Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film,”
    in Proc. MRS Fall Meeting 2019, Boston, Massachusetts, U.S., Dec. 1-6, 2019. (Poster)
  27. Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    “Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method,”
    in Proc. MRS Fall Meeting 2019, Boston, Massachusetts, U.S., Dec. 1-6, 2019. (Poster)
  28. Tomoki Iriya, Kyotaro Nitta, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Electroplating of Au-Pd Alloy Films and the Mechanical Properties,”
    in Proc. International Thin Films Conference (TACT 2019), Taipei, Taiwan, Nov. 17-20, 2019. (Poster)
  29. Cheng-Yao Lo and Daisuke Yamane
    “High-Sensitivity Capacitive Tactile Sensor with Vertically Stacked Hollow Structures,”
    in Proc. The 4th International Symposium on Biomedical Engineering, Act City Congress Center, Hamamatsu, Japan, November 14-15, 2019. (Poster)
  30. Atsushi Fujii, Kento Hisa, Musashi Kakugawa, Daisuke Yamane, Takayuki Shibata and Moeto Nagai
    “High-throughput Screening Device for Genes Related to Algal Phototaxis: Parallel Micro-Liquid Handling,”
    in Proc. The 4th International Symposium on Biomedical Engineering, Act City Congress Center, Hamamatsu, Japan, November 14-15, 2019. (Poster)
  31. Takashi Ichikawa, Tatsuya Koga, Daisuke Yamane, Shinishi Iida, Noboru Ishihara, Hiroyuki Ito, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu,
    “Shock Characteristics of MEMS Inertial Sensors Developed by Ti/Au Multi-Layer Metal Technology,”
    in Proc. MNC 2019 32nd International Microprocesses and Nanotechnology Conference, Hiroshima, Japan, Oct. 28-31, 2019. (Oral)
  32. Yu-Hao Jen, Chia-Tso Mo, Kean Aw, Daisuke Yamane, Cheng-Yao Lo,
    “Extensive Sensitivity Enhancement in Stacked Capacitive Tactile Sensors,”
    in Proc. IEEE Sensors 2019, Montreal, Canada, Oct. 27-30, 2019. (Poster)
  33. Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    “Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability,”
    in Proc. IEEE Sensors 2019, Montreal, Canada, Oct. 27-30, 2019. (Poster)
  34. Tatsuya Koga, Takashi Ichikawa, Naoto Tanaka, Taiki Ogata, Hiroki Ora, Daisuke Yamane, Noboru Ishihara, Hiroyuki Ito, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu,
    “High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds,”
    in Proc. IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019), Nara, Japan, Oct. 17-19, 2019. (Poster)
  35. 【Invited】
    Katsuyuki Machida, Daisuke Yamane, Toshifumi Konishi, Shin-ichi Iida, Noboru Ishihara, Tso-Fu Mark Chang, Masato Sone, Hiroyuki Ito and Kazuya Masu,
    “MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology,”
    in Proc. 236th ECS Meeting, Atlanta, GA, Oct. 13-17, 2019.
  36. Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test,”
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  37. Kyotaro Nitta, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    “Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components,”
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  38. Hitomi Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications,”
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  39. Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications,”
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  40. Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hiroshi Toshiyoshi, and Daisuke Yamane,
    “Bandwidth Enhancement of Vibrational Energy Harvesters by a Voltage-Boost Rectifier Circuit,”
    in Proc. 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019 – EUROSENSORS XXXIII), 23-27 June 2019, Estrel Berlin Hotel&Congress Center, Berlin, Germany (Late news, Poster)
  41. Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test,”
    in Proc. The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019), Kiev, Ukraine, May 27-30, 2019. (Poster)
  42. Hitomi Watanabe, Takuma Suzuki, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence,”
    in Proc. The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019), Kiev, Ukraine, May 27-30, 2019. (Poster)
  43. Masato Sone, Hao-Chun Tang, Masaharu Yoshiba, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu
    “Mechanical properties of electrodeposited gold-copper alloy by micro-compression test,”
    in Proc. The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019), Kiev, Ukraine, May 27-30, 2019. (Poster)
  44. Ken Atsumi, Shota Otobe, Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, and Kazuya Masu
    “Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers,”
    in Proc. Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019), 12-15 May 2019, Paris, France, pp.121-124. (Oral)
  45. Daisuke Yamane, Shota Otobe, Ken Atsumi, Tatsuya Koga, Toshifumi Konishi, Teruaki Safu, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu,
    “A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS,”
    in Proc. 32nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea, Jan. 27-31, 2019, pp. 684-687. (Poster)
  46. Daisuke Yamane, Hiroaki Honma, and Hiroshi Toshiyoshi,
    “A MEMS VIBRATORY ENERGY HARVESTER CHARGED BY AN OFF-CHIP ELECTRET,”
    in Proc. 32nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea, Jan. 27-31, 2019, pp. 1025-1028. (Poster)
  47. Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hidehiko Sekiya, Hiroshi Toshiyoshi, and Daisuke Yamane,
    “A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations,”
    in Proc. 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2018), December 4-7, 2018, Daytona Beach, FL, USA, PT-11d. (Poster)
  48. 【Invited】
    Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito and Kazuya Masu,
    “Sub-1mG MEMS Inertial Sensor for Biomedical Applications,”
    in Proc. The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and Education(ICNERE2018), Research Institute of Electronics, Shizuoka University, Japan, Nov. 27-29, 2018.
  49. Shota Otobe, Tatsuya Koga, Ken Atsumi, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Shin-ichi Iida, Hiroyuki. Ito, Noboru Ishihara, Katsuyuki Machida and Kazuya Masu,
    “A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes,”
    in Proc. 31st International Microprocesses and Nanotechnology Conference (MNC2018), November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan, 15P-7-121L (Poster)
  50. Cheng-Yao Lo and Daisuke Yamane,
    “Vibration Characteristics of a High-Sensitivity Flexible Capacitive Tactile Sensor with Reduced Structural Rigidity,”
    in Proc. The 3rd International Symposium on Biomedical Engineering, Satake Memorial Hall, Hiroshima University, Hiroshima, Japan, November 8-9, 2018. (Poster)
  51. Musashi Kakugawa, Kento Hisa, Daisuke Yamane, Takayuki Shibata and Moeto Nagai,
    “Parallel Manipulation of Small-volume Solutions for Analyzing Phototaxis and Gene Expression of Algae,”
    in Proc. The 3rd International Symposium on Biomedical Engineering, Satake Memorial Hall, Hiroshima University, Hiroshima, Japan, November 8-9, 2018. (Poster)
  52. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever,”
    in Proc. IUMRS-ICA (19th International Union of Materials Research Societies International Conference in Asia), Bali, Indonesia, Oct. 31 – Nov. 2, 2018. (Poster)
  53. Ken Hashigata, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    “Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever,”
    in Proc. IUMRS-ICA (19th International Union of Materials Research Societies International Conference in Asia), Bali, Indonesia, Oct. 31 – Nov. 2, 2018. (Poster)
  54. Hitomi Watanabe, Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  55. Takahiro Yamamoto, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys for Reliability of MEMS Devices,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  56. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  57. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  58. Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  59. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  60. Kyotaro Nitta, Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  61. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Kyotaro Nitta, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test,”
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  62. Tso-Fu Mark Chang, Hao-Chun Tang, Kyotaro Nitta, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    “Electrodeposition of High Strength Au-Cu Alloys for MEMS Devices,”
    in Proc. 2018 International Conference on Solid State Devices and Materials (SSDM2018), The University of Tokyo, Tokyo, Japan, Sept. 9-13, 2018. (Oral)
  63. 【Invited】
    Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu, “High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology,”
    Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development, September 3-4, 2018, National Chiao Tung University (NCTU), Hsinchu, Taiwan.
  64. 【Invited】
    Kazuya Masu, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Tso-Fu Mark Chang, Masato Sone and Yoshihiro Miyake,
    “CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease,”
    4th International Conference on Condensed Matter and Materials Physics, August 16-17, 2018, London, UK.
  65. Ken Hashigata, Haochun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “The effect of acid pre-treatment on electroplating of gold on titanium substrate,”
    in Proc. 32nd International Conference on Surface Modification Technologies (SMT32), June 27-29, 2018, Gipuzkoa Science and Technology Park, San Sebastian, Spain. (Oral)
  66. Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida and Kazuya Masu
    “Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection,”
    in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018), June 24-27, 2018, HKUST, Hong Kong SAR (Oral)
  67. 【Invited】
    Masato Sone, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu,
    “Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer,”
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  68. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Kyotaro Nitta, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Structure Stability of Ti/Au Micro-Cantilever Evaluated by Long-Term Vibration Test,”
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  69. Chun-Yi Chen, Haochun Tang, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices,”
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  70. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating,”
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  71. Kyotaro Nitta, Koichiro Tachibana, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    “Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components,”
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  72. 【Invited】
    Daisuke Yamane
    “High-Sensitivity MEMS Inertial Sensor for Medical Applications,”
    The 2nd Taiwan-Japan Joint Symposium in Taiwan, Japan-Taiwan Young Researcher Mini-Workshop, May 31 – June 1, 2018, National Tsing Hua University (Hsinchu) and Fullon Hotel Taipei (Taipei), Taiwan.
  73. Kyoutarou Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices,”
    in Proc .233rd ECS Meeting, Seattle, WA, USA, May 13-17, 2018. (Poster)
  74. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Shin-ichi Iida, Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida and Kazuya Masu,
    “Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology,”
    in Proc. 13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018), Grand Hyatt Singapore, Singapore, April 21-26, 2018, WM-II-f_3_243. (Oral)
  75. Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys,”
    in Proc. 22nd Topical Meeting of the International Society of Electrochemistry, Tokyo, Japan, April 15-18, 2018. (Poster)
  76. Ken Hashigata, Hao-Chun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film,”
    in Proc. 22nd Topical Meeting of the International Society of Electrochemistry, Tokyo, Japan, April 15-18, 2018. (Poster)
  77. Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology,”
    in Proc. 2017 MRS Fall Meeting, Boston, Massachusetts, U.S., Nov. 26- Dec. 1, 2017. (Poster)
  78. Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests,”
    in Proc. 2017 MRS Fall Meeting, Boston, Massachusetts, U.S., Nov. 26- Dec. 1, 2017. (Poster)
  79. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology,”
    in Proc. 2017 MRS Fall Meeting, Boston, Massachusetts, U.S., Nov. 26- Dec. 1, 2017. (Poster)
  80. Cheng-Yao Lo, Daisuke Yamane, and Kazuya Masu,
    “Force Response and Vibration Characteristics of Flexible Capacitive Sensors,”
    in Proc. The 2nd International Symposium on Biomedical Engineering, Multi-Purpose Digital Hall, Tokyo Institute of Technology, Tokyo, Japan, November 7-9, 2017, pp. 284-285, B-113. (Poster)
  81. Moeto Nagai, Musashi Kakugawa, Daisuke Yamane, and Kazuya Masu,
    “Vibration Testing of Microfluidic Devices for Cell Analysis: Toward a Chip in Everyday Life,”
    in Proc. The 2nd International Symposium on Biomedical Engineering, Multi-Purpose Digital Hall, Tokyo Institute of Technology, Tokyo, Japan, November 7-9, 2017, pp. 312-313, B-127. (Poster)
  82. Hirofumi Niijima, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu,
    “A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes,”
    in Proc. The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Nov. 6-9, 2017, Ramada Plaza Jeju Hotel, Jeju, Korea. (Late News, Poster)
  83. Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu and Shinichi Iida,
    “Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating,”
    in Proc. The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Nov. 6-9, 2017, Ramada Plaza Jeju Hotel, Jeju, Korea. (Oral)
  84. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-P10. (Poster)
  85. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, E6-P26. (Poster)
  86. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-P09. (Poster)
  87. Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-P08. (Poster)
  88. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Strategies of Mechanical Strengthening in Electroplated Au Materials,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, E6-P02. (Poster)
  89. 【Invited】
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu,
    “Sub-1mG Inertial Sensors by Multi-layer Metal Technology,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-05.
  90. 【Invited】
    Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, E6-12.
  91. 【Invited】
    Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu,
    “Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers,”
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-02.
  92. Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components,”
    in Proc. TACT2017 International Thin Films Conference, National Dong Hwa University, Hualien, Taiwan, Oct. 15-18, 2017. (Poster)
  93. Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida and Kazuya Masu,
    “A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes,”
    in Proc. 2017 Int’l Conference on Solid State Devices and Materials (SSDM 2017), Sep. 19-22, 2017, Sendai International Center, Sendai, Miyagi, Japan. (Late News, Oral)
  94. Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu,
    “Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology,”
    in Proc. 2017 Int’l Conference on Solid State Devices and Materials (SSDM 2017), Sep. 19-22, 2017, Sendai International Center, Sendai, Miyagi, Japan. (Oral)
  95. Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara and Kazuya Masu,
    “A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors,”
    in Proc. 2017 Int’l Conference on Solid State Devices and Materials (SSDM 2017), Sep. 19-22, 2017, Sendai International Center, Sendai, Miyagi, Japan. (Oral)
  96. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test,”
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  97. Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End,”
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  98. Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices,”
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  99. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    “Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test,”
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  100. Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications,”
    in Proc. RACI National Centenary Conference, Melbourne, Australia, July 23-28, 2017. (Poster)
  101. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices,”
    in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017. (Poster)
  102. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Micro-Mechanical Property Evaluation of Electroplated Au/Cu Alloys toward Applications in MEMS Accelerometers,”
    in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017. (Poster)
  103. Chun-Yi Chen, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components,”
    in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017. (Poster)
  104. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, and Kazuya Masu,
    “Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology,”
    in Proc. The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan, pp. 2187-2190. (Poster)
  105. Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer,”
    in Proc. 21st Topical Meeting of the International Society of Electrochemistry, Szeged, Hungary, April 23-26, 2017. (Poster)
  106. 【Invited】
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, and Kazuya Masu,
    “MEMS inertial sensors for biomedical applications,”
    in Proc. 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017), UCLA Meyer & Renee Luskin Conference Center, Los Angeles, CA, USA, April 9-12, 2017.
  107. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Masato Sone and Kazuya Masu,
    “A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices,”
    in Proc. 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017), UCLA Meyer & Renee Luskin Conference Center, Los Angeles, CA, USA, April 9-12, 2017, MoP2.6, pp. 264-267. (Poster)
  108. Daisuke Yamane, Kazuya Masu, and Cheng-Yao Lo,
    “A Study on Flexible Tactile Sensor for Assistance Robots,”
    in Proc. International Symposium on Biomedical Engineering, Akio Suzuki Memorial Hall, M&D Tower, Tokyo Medical and Dental University, Tokyo, Japan, November 10-11, 2016, pp. 126-127. (Poster)
  109. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hideaki Nakajima, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices,”
    in Proc. 29th International Microprocesses and Nanotechnology Conference (MNC 2016), ANA Crowne Plaza Kyoto, Kyoto, Japan, November 8-11, 2016, 10D-5-1. (Oral)
  110. Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology,”
    in Proc. IEEE Sensors 2016, Oct. 30 – Nov. 2, 2016, Orland, FL, USA., pp. 1162-1164. (Oral)
  111. Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating,”
    in Proc. The 2016 PRiME Meeting, Hawaii, USA, Oct. 2-7, 2016. (Poster)
  112. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida,
    “A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology,”
    in Proc. 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016), Tsukuba International Congress Center, Tsukuba, Japan, Sept. 26-29, 2016, pp. 485-486. (Oral)
  113. Toshifumi Konishi,Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System,”
    in Proc. 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016), Tsukuba International Congress Center, Tsukuba, Japan, Sept. 26-29, 2016, pp. 673-674. (Poster)
  114. 【Invited】
    Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers,”
    in Proc. 2nd International Conference and Expo on Separation Techniques, Valencia, Spain, Sep. 26-28.
  115. Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer,”
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  116. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer,”
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  117. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices,”
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  118. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide,”
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  119. 【Invited】
    Kazuya Masu, Daisuke Yamane, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake,
    “Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson’s Disease,”
    in Proc. the 46th European Solid-State Device Re-search Conference (ESSDERC), Swisstech Convention Centre, Lausanne, Switzerland, Sep. 12-15, 2016, pp.99-104.
  120. 【Invited】
    Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer,”
    in Proc. The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology, Kaohsiung, Taiwan, Sep. 8-10.
  121. 【Invited】
    Masato Sone, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, and Kazuya Masu,
    “Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications,”
    in Proc. Integrative Biology-2016, Berlin, Germany, July 18-20 .
  122. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyohi, Kazuya Masu, and Katsuyuki Machida,
    “A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology,”
    in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), Kanazawa, Japan, June 26 – 29, 2016, pp. 299-300. (Poster)
  123. 【Invited】
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A 1-mG MEMS Sensor,”
    in Proc. 229th ECS Meeting, San Diego, CA, USA, May 29 – June 3, 2016, MA2016-01(22):1147.
  124. Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Masakazu Sonobe, Takumi Kobayashi, Yamato Fukuta, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, and Katsuyuki Machida,
    “A Study of Railroad Vehicle Control by Inertial Sensors,”
    in Proc. 11th World Congress on Railway Research, Milan, Italy, May 29 – June 3, 2016. (Poster)
  125. Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Pulse Electroplating of Au Films with Ultra High Strength,”
    in Proc. 229th ECS Meeting, San Diego, CA, USA, May 29- June 2, 2016, MA2016-01:1123. (Poster)
  126. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    “Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating,”
    in Proc. ISE – Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  127. Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    “Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure,”
    in Proc. ISE – Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  128. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte,”
    in Proc. ISE – Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  129. Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices,”
    in Proc. ISE – Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  130. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    “Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide,”
    in Proc. ISE – Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  131. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida,
    “A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology,”
    in Proc. IEEE NEMS 2016,Matsushima Bay and Sendai, Miyagi, Japan, April 17-20, 2016, B3P-B-54. (Poster)
  132. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology,”
    in Proc. IEEE Inertial Sensors 2016, Surf & Sand Resort, Laguna Beach, California, USA, Feb. 23-25, 2016, Late News, pp. 148-149. (Oral)
  133. Masaharu Yoshiba, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Micro-Mechanical Properties of Electrodeposited Gold Thin Films,”
    in Proc. TACT 2015 International Thin Films Conference, National Cheng Kung Univerisyt, Tainan, Taiwan, Nov, 15-18, 2015, pp. 513-516. (Poster)
  134. Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A Sub-1G CMOS-MEMS Accelerometer,”
    in Proc. IEEE Sensors 2015, BEXCO, Busan, South Korea, Nov. 1-4, 2015, pp. 513-516. (Oral)
  135. Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida,
    “Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology,”
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, Late News, pp. 786-787. (Oral)
  136. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    “Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices,”
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 52-53. (Poster)
  137. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Mechanical Properties of Electrodeposited Gold for MEMS Device,”
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 48-49. (Poster)
  138. Toshifumi Konishi, Daisuke Yamane, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Hiroshi Toshiyoshi, and Katsuyuki Machida,
    “Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer,”
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 798-799. (Oral)
  139. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    “Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers,”
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p81. (Poster)
  140. Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating,”
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p5. (Poster)
  141. Masaharu Yoshiba, Chun-Yi Chen, Tsu-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    “Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test,”
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p19. (Poster)
  142. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology,”
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p11. (Poster)
  143. Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida,
    “A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,”
    in Proc. 25th Advanced Metallization Conference Asian Session (ADMETAplus2015), Sept. 16-18, 2015, Global Convention Plaza, Seoul National University, Seoul, Korea. (Poster)
  144. Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida,
    “A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,”
    in Proc. 32nd Advanced Metallization Conference (AMC2015), Sept. 9-11, 2015, the West Pickle Research Building (WPR) of The University of Texas at Austin, Austin, Texas, US. (Oral)
  145. Masaharu Yoshiba, Chun-yi Chen, Tso-fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    “Compression Deformation of Micro-components Fabricated by FIB from Gold Electrodeposited Films,”
    in Proc. International Symposium for Advanced Materials Research (ISAMR 2015), Sun Moon Lake, Taiwan, Aug. 16-20, 2015, P13. (Poster)
  146. 【Invited】
    Daisuke Yamane, Kazuya Masu, and Katsuyuki Machida,
    “A Sub-1G MEMS Inertial Sensor,”
    in Proc. International Symposium for Advanced Materials Research (ISAMR 2015), Sun Moon Lake, Taiwan, Aug. 16-20, 2015, ID20.
  147. 【Invited】
    Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, and Kazuya Masu,
    “Nano-G metrology system and its biomedical applications by CMOS-MEMS technology,”
    in Proc. 3rd International Conference on Integrative Biology, Melia Valencia, Valencia, Spain, Aug. 4-6, 2015, pp. 87.
  148. Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone,
    “Stability of Movable Structure Formed by Au Electroplating for MEMS Devices,”
    in Proc. 8th Int. Conf. on Materials for Advanced Technologies (ICMAT 2015), SUNTEC, Singapore, June 28 – July 3, 2015. (Poster)
  149. 【Invited】
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A Sub-1G MEMS Sensor,”
    in Proc. the 227th ECS Meeting, the Hilton Chicago, Chicago, Illinois, USA, May 24-28, 2015, pp. 1332.
  150. 【Invited】
    Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu,
    “CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-,”
    in Proc. 2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015), Kyoto Terrsa, Kyoto, Japan, April 14-17, 2015, pp. 201.
  151. Takaaki Matsushima, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology,”
    in Proc. 27th Int. Microprocesses and Nanotechnology Conference (MNC 2014), Hilton Fukuoka Sea Hawk, Fukuoka, Japan, Nov. 4-7, 2014, pp. 6C-5-5.
  152. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A 1mG-to-20G Integrated MEMS Inertial Sensor,”
    in Proc. IEEE SENSORS 2014, Valencia Conference Center, Valencia, Spain, Nov. 2-5, 2014, pp. 1591-1594.
  153. Toshifumi Konishi, Takaaki Matsushima, Daisuke Yamane, Kazuya Masu, Hiroshi Toshiyoshi, and Katsuyuki Machida,
    “A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator,”
    in Proc. Int. Conf. on Solid-State Devices and Materials (SSDM 2014), Tsukuba International Congress Center, Tsukuba, Japan, , Sep. 8-11, 2014, pp. 100-101.
  154. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    “A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,”
    in Proc. Int. Conf. on Solid-State Devices and Materials (SSDM 2014), Tsukuba International Congress Center, Tsukuba, Japan, Sep. 8-11, 2014, pp. 974-975.
  155. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,”
    in Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), EXCO, Daegu, Korea. June 29 – July 2, 2014, P2-55.
  156. Hiroyuki Ito, Shoichi Masui, Youichi Momiyama, Atsushi Shirane, Motohiro Takayasu, Yoshihiro Yoneda, Taiki Ibe, Taisuke Hamada, Sho Ikeda, Daisuke Yamane, Noboru Ishihara, and Kazuya Masu,
    “2.3 pJ/bit Frequency-Stable Impulse OOK Transmitter Powered Directly by an RF Energy Harvesting Circuit with -19.5 dBm Sensitivity,”
    IEEE Radio Frequency Integrated Circuits Symposium, Tampa Convention Center, USA, pp.13-15, Jun. 1-3, 2014.
  157. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer,”
    in Proc. 2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC 2014), San Jose, CA, USA, May 20-23, 2014, pp.113-116.
  158. 【Invited】
    Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu,
    “Integrated CMOS-MEMS Technology and its Application,”
    in Proc. the 225th Meeting of the Electrochemical Society (The 2nd More-than-Moore Symposium), Orland, Florida, USA, May 11-16, 2014, 1407.
  159. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer,”
    in Proc. Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014), Cannes, Cote d’Azur, France, April 1-4, 2014, pp. 69-72.
  160. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “Sub-1G MEMS Accelerometer,”
    in Proc. IEEE SENSORS 2013, Baltimore, Maryland, USA, Nov. 3-6, 2013, pp. 171-174.
  161. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Satoshi Maruyama, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology,”
    2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013), Hilton Fukuoka Sea Hawk, Fukuoka, Japan, Sep. 24-27, 2013, G-4-2.
  162. Motohiro Takayasu, Atsushi Shirane, Sang yeop Lee, Daisuke Yamane, Hiroyuki Ito, Mi Xiaoyu, Hiroaki Inoue, Fumihiko Nakazawa, Satoshi Ueda, Noboru Ishihara, and Kazuya Masu,
    “An 8-ch, 20-V Output CMOS Switching Driver with 3.3-V Power Supply for Integrated MEMS Devices Controlling,”
    2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013), Hilton Fukuoka Sea Hawk, Fukuoka, Japan, Sep. 24-27, 2013, PS-5-1.
  163. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION,”
    in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013, pp.22-25.
  164. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers,”
    25th Int. Microprocesses and Nanotechnology Conference (MNC 2012), Kobe Meriken Park Oriental Hotel, Kobe, Japan, Oct. 30 – Nov. 2, 2012, pp. 1B-5-4.
  165. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    “A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer,”
    2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012), Kyoto Int. Conf. Center, Kyoto, Japan, Sep. 25-27, 2012 (Late News), pp.1134-1135.
  166. Toshifumi Konishi, Satoshi Maruyama, Makoto Mita, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language,”
    2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012), Kyoto Int. Conf. Center, Kyoto, Japan, Sep. 25-27, 2012, pp. 1120-1121.
  167. Daisuke Yamane, Yi-Chien Wu, Ting-Hsiang Wu, Hiroshi Toshiyoshi, Michael A. Teitell, and Pei-Yu Chiou,
    “Real-Time Monitoring of Photothermal Porated Mammalian Cells by Electric Impedance Sensors,”
    IEEE International Conference on Optical MEMS & Nanophotonics, Banff, Alberta, Canada, August 6-9, 2012, pp. 220-221.
  168. 【Invited】
    Daisuke Yamane, and Hiroshi Toshiyoshi,
    “Monolithic integration of passive RF components by MEMS,”
    IEEE 2011 International Symposium on VLSI Design, Automation and Test (VLSI-DAT), Hsinchu, Taiwan, Apr. 25-28, 2011.
  169. Daisuke Yamane, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “A Ku-Band RF-MEMS Phase Shifter with SOI Double-Side Bulk-Micromachining Design,”
    5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Perth, Australia, July 6-9, 2010, pp.68.
  170. Daisuke Yamane, Hiroyuki Fujita, Hiroshi Toshiyoshi and Shigeo Kawasaki,
    “Development of a Dual-SPDT RF-MEMS Switch for Ku-band,”
    IEEE Radio and Wireless Symposium (RWS), New Orleans, LA, USA, Jan.10-14, 2010, pp.432-435.
  171. Daisuke Yamane, Kiyotaka Yamashita, Harunobu Seita, Hiroyuki Fujita, Hiroshi Toshiyoshi and Shigeo Kawasaki,
    “A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation,”
    Asia-Pacific Microwave Conference (APMC), Singapore, Dec. 7-10, 2009, pp.555-558.
  172. Daisuke Yamane, Kiyotaka Yamashita, Harunobu Seita, Hiroshi Toshiyoshi, and Shigeo Kawasaki,
    “A Prototype of Ku-Band Small-Sized LTCC Phase Shifter with RF-MEMS Switches,”
    2009 Thailand-Japan MicroWave (TJMW2009), King Mongkut’s University of Technology North Bangkok Bangkok, Thailand, August 20-21, 2009, FR7-5.
  173. Kazuhiro Takahashi, Makoto Mita, Muneki Nakada, Daisuke Yamane, Akio Higo, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “Development of Multi-user Multi-chip SOI CMOS-MEMS Process,”
    IEEE MEMS, Sorrent, Italy, Jan. 25-29, 2009, pp.701-704.
  174. Daisuke Yamane, Harunobu Seita, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “A 12-GHz DPDT RF MEMS Switch with Layer-wise Waveguide/Actuator Design Technique,”
    IEEE MEMS, Sorrent, Italy, Jan. 25-29, 2009, pp.888-891.
  175. Daisuke Yamane, Takeshi Yamamoto, Kenichiro Urayama, Kiyotaka Yamashita, Hiroshi Toshiyoshi, and Shigeo Kawasaki,
    “A Phase Shifter by LTCC Substrate with an RF-MEMS Switch,”
    The 38th European Microwave Conference (EuMC), Amsterdam, Netherlands, Oct.28-31, 2008, pp.611-613.
  176. David Dubuc, Daisuke Yamane, Zhang Rui, Yuheon Yi, Katia Grenier, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “Modelling and Design Guidelines of Metamaterial-based Artificial Dielectric for the Miniaturization of Microwave Passive Circuit,”
    Metamaterials’ 2008, Pamplona, Spain, Sep. 21-26, 2008.
  177. 【Invited】
    Daisuke Yamane, Kazuhiro Takahashi, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “Microwave Switches by MEMS Technology and their Application to Phase-Shifter,”
    Second Japan-Taiwan Workshop on Future Frequency Control Devices, Tamkang University, Taiwan, Dec. 5, 2007.
  178. 【Invited】
    Daisuke Yamane, Kazuhiro Takahashi, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    “RF-MEMS Switches for 5.8 GHz Phase Shifter Application,”
    Int. Workshop on Piezo-devices based on Latest MEMS Technologies, Nihon University, Tokyo, Nov. 26-27, 2007.
  179. Shinji Yamashita and Daisuke Yamane,
    “Stabilization of mode-locked fiber lasers using Bismuth-oxide-based highly nonlinear fiber,”
    Topical Meeting on Optical Amplifiers and Their Applications (OAA 2006), Whistler, Canada, June 25, 2006, no. OMD6.