Title：MEMS post-processed self-assembled electret for vibratory energy harvesters
Journal：Applied Physics Letters, Vol. 119, 254102, Dec. 20, 2021.
Authors：D. Yamane, H. Kayaguchi, K. Kawashima, H. Ishii, and Y. Tanaka
We have developed an electret-type MEMS environmental vibration energy harvester that does not require electret charging processing. This is the result of joint research with Chiba University.
This result was released in collaboration with Ritsumeikan University, Chiba University, and JST (Japan Science and Technology Agency, funding agency).