MEMS × Functional Materials × LSI × AI

We develop next-generation smart microdevices by integrating MEMS, functional materials, LSI, and AI.
By combining expertise in mechanics, electronics, optics, materials, chemistry, and information science, we create new technologies for future semiconductor systems.

MEMS: Micro-Electro-Mechanical Systems — microsystems realized using semiconductor-based microfabrication technologies.
LSI: Large-Scale Integration — highly integrated electronic circuits realized using semiconductor technologies.

Selected Research Topics

CMOS-MEMSチップ(指先とのサイズ比較)

CMOS-MEMS

Integrated MEMS and CMOS LSI for compact and intelligent microsystems.

SAE-MEMS

Self-assembled electrets (SAEs) integrated with MEMS for sensing and energy harvesting.

MEMS Sensors / Harvesters / Resonators

Microdevices for sensing, energy harvesting, and resonant functions.

Optical Fiber × MEMS

Integration of optical fibers and MEMS for advanced sensing and functional devices.

International Collaboration

We collaborate with researchers around the world, combining diverse perspectives and expertise to create new technologies.

Current partner institutions: National Tsing Hua University (Taiwan), University of Southampton (UK), and Czech Technical University in Prague (Czech Republic).

We also conduct collaborative research with universities, research institutes, and companies in Japan.

Growing through Research: From Undergraduate to Master’s and Doctoral Studies

We support students in developing their expertise and research capabilities from undergraduate research to Master’s and doctoral studies. Students can present their work at academic conferences, publish in journal papers, and participate in international collaborations.

In the age of AI and robotics, students are encouraged not only to use existing technologies, but also to identify new challenges and create new value.

  • Undergraduate: Build research foundations and identify research questions.
  • Master’s: Develop expertise and conduct research independently.
  • Doctoral: Lead original research and create new knowledge and technologies.

Programs: Department of Mechanical Engineering / Mechanical and Information Engineering Course | Graduate School of Science and Engineering / Mechanical Systems Major

Join Our Lab

We welcome students and researchers interested in micro- and nanotechnologies. Laboratory visits and inquiries about study and research opportunities are welcome.
For laboratory visits or inquiries about joining the laboratory, please contact Prof. Daisuke Yamane by email.

Undergraduate Students

Undergraduate research, laboratory assignment, and laboratory visits
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Graduate Students

Master’s and doctoral studies, research opportunities, and admission consultation
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Researchers & Collaborators

Postdoctoral research, visiting research, and collaborative research
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