著書｜Books

  1. Tso-Fu Mark Chang, Hideaki Nakajima, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Hiroshi Toshiyoshi, and Masato Sone, “Effective Young’s Modulus of Electrodeposited Gold for Design of MEMS Accelerometers,” Advances in Microelectronics: Reviews, IFSA PUBLISHING, S.L., Vol. 3, Apr. 2021.
  2. Chun-Yi Chen, Masaharu Yoshiba, Haochun Tang, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi and Katsuyuki Machida:
    “4. Pulse-Current Electrodeposition of Gold” in Masato Sone and Kazuya Masu (Eds.) :”Novel Metal Electrodeposition and the Application toward MEMS Device,” March 6th, 2019, IntechOpen, London, UK.
    DOI: 10.5772/intechopen.80845
  3. Haochun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi and Katsuyuki Machida:
    “5. Electrodeposition of Gold Alloys and the Mechanical Properties” in Masato Sone and Kazuya Masu (Eds.) :”Novel Metal Electrodeposition and the Application toward MEMS Device,” March 6th, 2019, IntechOpen, London, UK.
    DOI: 10.5772/intechopen.80755
  4. Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Hiroyuki Ito:
    “8. Multi-Physics Simulation Platform and Multi-Layer Metal Technology for CMOS-MEMS Accelerometer with Gold Proof Mass” in Masato Sone and Kazuya Masu (Eds.) :”Novel Metal Electrodeposition and the Application toward MEMS Device,” March 6th, 2019, IntechOpen, London, UK.
    DOI: 10.5772/intechopen.81832
  5. Tso-Fu Mark Chang, Chun-Yi Chen, Yota Ishizuka, Minami Teranishi, Takuma Suzuki, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors“
    Advances in Microelectronics Reviews, Vol. 2, IFSA Publishing, S. L. (Barcelona, Spain) pp. 23-48, Jan. 2019
    ISBN: 978-84-09-08160-8
    e-ISBN: 978-84-09-07322-1
  6. Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    “Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors“
    Advances in Microelectronics Reviews, Vol. 1, IFSA Publishing, S. L. (Barcelona, Spain) pp. 93-106, Dec. 2017
    ISBN: 978-84-697-8633-8
    e-ISBN: 978-84-697-8634-5